SPUTTERING OF TA2O5 BY AR+ IONS AT ENERGIES BELOW 1-KEV

被引：77

作者：

OECHSNER, H ^{[1
]}

SCHOOF, H ^{[1
]}

STUMPE, E ^{[1
]}

机构：

[1] SONDERFORSCH BEREICH 126,GOTTINGEN,FED REP GER

来源：

SURFACE SCIENCE | 1978年 / 76卷 / 02期

关键词：

D O I：

10.1016/0039-6028(78)90102-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：343 / 354

页数：12

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