共 18 条
[1]
Alley G. D., 1980, International Electron Devices Meeting. Technical Digest, P608
[2]
ALLEY GD, 1972, THESIS U KANSAS LAWR
[3]
ALLEY GD, 1979, 7TH P BIEN CORN C AC, P43
[4]
Bozler C. O., 1979, IEEE INT ELECTRON DE, P384
[6]
BOZLER CO, 1979, 7TH P BIEN CORN C AC, P33
[8]
X-RAY-LITHOGRAPHY AT - 100-A LINEWIDTHS USING X-RAY MASKS FABRICATED BY SHADOWING TECHNIQUES
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1979, 16 (06)
:1615-1619