STRUCTURAL AND ELASTIC PROPERTIES OF ZIRCONIUM NITRIDE ALUMINUM NITRIDE MULTILAYERS

被引：24
作者：
MENG, WJ
EESLEY, GL
SVINARICH, KA
机构：
[1] Physics Department, General Motors Research Laboratories, Warren
来源：
PHYSICAL REVIEW B | 1990年 / 42卷 / 07期
关键词：
D O I：
10.1103/PhysRevB.42.4881
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We have synthesized a series of zirconium nitride aluminum nitride multilayers with a reactive sputtering technique. Structure and elastic response of these multilayers are characterized by x-ray-diffraction and transient piezoreflectance measurements. We observe a systematic decrease of the longitudinal elastic response in the direction of film growth as the composition modulation wavelength decreases. This contradicts a recent model of elastic response which predicts the absence of elastic anomaly in metal-insulator multilayers. © 1990 The American Physical Society.
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页码：4881 / 4884
页数：4
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