DEPOSITION OF FLUOROCARBON FILMS BY REMOTE RF GLOW-DISCHARGE

被引：0

作者：

CASTNER, DG

FAVIA, P

RATNER, BD

机构：

[1] UNIV WASHINGTON,DEPT CHEM ENGN,SEATTLE,WA 98195

[2] UNIV WASHINGTON,CTR BIOENGN,SEATTLE,WA 98195

来源：

ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1995年 / 209卷

关键词：

D O I：

暂无

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：165 / POLY

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