NONLINEAR EFFECTS IN HEAVY-ION SPUTTERING

被引：209

作者：

ANDERSEN, HH ^{[1
]}

BAY, HL ^{[1
]}

机构：

[1] UNIV AARHUS,INST PHYS,DK-8000 AARHUS,DENMARK

来源：

JOURNAL OF APPLIED PHYSICS | 1974年 / 45卷 / 02期

关键词：

D O I：

10.1063/1.1663348

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：953 / 954

页数：2

共 18 条

[1]

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[2]

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[3]

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[4]

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[7]

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[9] SPUTTERING OF COPPER BY BOMBARDMENT WITH IONS OF 5-25 KEV [J].

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[10] THEORETICAL ASPECTS OF CATHODE SPUTTERING IN THE ENERGY RANGE OF 5-25 KEV [J].

ROL, PK ;

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KISTEMAKER, J .

PHYSICA, 1960, 26 (11) :1009-1011

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