QUANTITATIVE ANALYSIS OF SMALL PARTICLES BY SUBMICRON SECONDARY ION MASS SPECTROMETRY

被引：1

作者：

Satoh, Hitomi ^{[1
]}

Owari, Masanori ^{[1
]}

Nihei, Yoshimasa ^{[1
]}

机构：

[1] Univ Tokyo, Inst Ind Sci, Minato Ku, Tokyo 106, Japan

来源：

ANALYTICAL SCIENCES | 1991年 / 7卷

关键词：

secondary ion mass spectrometry; focused ion beam; gallium; relative sensitivity factor;

D O I：

10.2116/analsci.7.Supple_533

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Relative sensitivity factors (RSFs) of thirteen elements in oxide glass matrix were determined for a secondary ion mass spectrometry(SIMS) with gallium focused ion beam(FIB). Reproducibility of RSFs was good, sample-to-sample scattering of RSF values was relatively small, and dependence of RSFs on the first ionization potential is reasonable. To check validity of the RSFs, coal fly ash particles and glass fiber sample were analyzed. The results were in reasonable agreement with the data obtained by the bulk chemical analysis.

引用

页码：533 / 536

页数：4

共 3 条

[1] HIGH SPATIAL-RESOLUTION SECONDARY ION MASS-SPECTROMETRY WITH PARALLEL DETECTION SYSTEM [J].

NIHEI, Y ;

SATOH, H ;

TATSUZAWA, S ;

OWARI, M ;

ATAKA, M ;

AIHARA, R ;

AZUMA, K ;

KAMMEI, Y .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04) :1254-1257

[2]

Novak S. W., 1990, SECONDARY ION MASS 7, P87

[3] QUANTITATIVE-ANALYSIS BY SUB-MICRON SECONDARY ION MASS-SPECTROMETRY [J].

SATOH, H ;

OWARI, M ;

NIHEI, Y .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (03) :915-918

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