CORRELATION OF LIGHT-INDUCED-CHANGES WITH HYDROGEN CONTENT IN HYDROGENATED AMORPHOUS-SILICON FILMS

被引:6
|
作者
NEVIN, WA
YAMAGISHI, H
YAMAGUCHI, M
TAWADA, Y
机构
[1] Central Research Laboratories, Kanegafuchi Chemical Industry Co. Ltd., Hyogo-ku, Kobe 652, 2-80, 1-chome, Yoshida-cho
关键词
D O I
10.1063/1.104802
中图分类号
O59 [应用物理学];
学科分类号
摘要
By annealing H-rich intrinsic a-Si:H films at 340-degrees-C in a hydrogen atmosphere, we have prepared a series of samples with varying hydrogen content (C(H)), but essentially constant photoconductivity, Urbach energy, and microstructure. In this way, we have been able to eliminate some of the interfering factors contributing to the light-induced effect, thus enabling the influence of C(H) to be determined. A strong correlation is found between the stability and C(H), supporting the involvement of hydrogen in the light-induced mechanism.
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页码:2669 / 2671
页数:3
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