Piezoelectric Film Waveguides for Surface Acoustic Waves

The paper presents results of mathematical modeling of piezoelectric film waveguide structures for surface acoustic waves SAW). Piezoelectric ZnO film is supposed to be placed on a fused quartz substrate. The analytical ratios and numerical results allow to determine the design parameters of the waveguide structures to provide a single-mode SAW propagation mode. The results of amplitude and phase experimental studies of the SAW in the waveguide structures that were carried out on the laser optical sensing set up confirm the theoretical calculations.