OPTIMUM GEOMETRY OF A BROAD-BEAM ION-SOURCE

被引：0

作者：

SPIROV, TI

SHAPOVALOV, VI

机构：

来源：

INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 1993年 / 36卷 / 05期

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The effect of geometry on the parameters of the broad-beam ion source with two-grid accelerating system was investigated. The source emits a beam of argon ions with a diameter of approximately 60 mm with the ion energies of up to 2 keV and a current of up to 25 mA. The investigation was to find the ratio of the discharge-chamber diameter to its length and the cathode's shape and position at which the beam current's nonuniformity is less than 5% across the 60-mm beam at the maximum average current density.

引用

页码：747 / 749

页数：3