ELLIPSOMETRIC ANALYSIS OF AMORPHOUS OXIDE FILM GROWTH AND CRYSTALLINE OXIDE ISLAND DEVELOPMENT DURING THERMAL OXIDATION OF ALUMINUM

被引：13
作者：
BADIA, M [1 ]
机构：
[1] CTR RECH PECHINEY,VOREPPE 38,FRANCE
来源：
THIN SOLID FILMS | 1972年 / 13卷 / 02期
关键词：
D O I：
10.1016/0040-6090(72)90302-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：329 / 333
页数：5
相关论文
共 6 条
[1]   DETERMINATION OF PROPERTIES OF FILMS ON SILICON BY METHOD OF ELLIPSOMETRY [J].
ARCHER, RJ .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (09) :970-&
[2]   ELLIPSOMETRY IN SUB-MONOLAYER REGION [J].
BOOTSMA, GA ;
MEYER, F .
SURFACE SCIENCE, 1969, 14 (01) :52-&
[3]   KINETICS AND MECHANISM OF OXIDATION OF SUPERPURITY ALUMINUM IN DRY OXYGEN .2. GROWTH OF CRYSTALLITES OF GAMMA-ALUMINA [J].
DIGNAM, MJ ;
FAWCETT, WR .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (07) :663-+
[4]   NUCLEATION AND GROWTH OF OXIDE ESLANDS ON ALUMINUM [J].
HART, RK ;
MAURIN, JK .
SURFACE SCIENCE, 1970, 20 (02) :285-&
[5]   MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY [J].
MCCRACKIN, FL ;
PASSAGLIA, E ;
STROMBERG, RR ;
STEINBERG, HL .
JOURNAL OF RESEARCH OF THE NATIONAL BUREAU OF STANDARDS SECTION A-PHYSICS AND CHEMISTRY, 1963, A 67 (04) :363-+
[6]   The investigation of thin surface films on metals by means of reflected polarized light. [J].
Tronstad, L .
TRANSACTIONS OF THE FARADAY SOCIETY, 1933, 29 :0502-0513
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