共 6 条
[1]
Aoyama H., 1988, Journal of the Japan Society of Precision Engineering, V54, P558, DOI 10.2493/jjspe.54.558
[2]
HATAMURA Y, 1987, P JAPAN SOC PRECISIO, P495
[3]
KIKUIRI N, 1988, P JAPAN SOC PRECISIO, P943
[4]
SAKAI F, 1987, P JAPAN SOC PRECISIO, P251
[5]
TANAGUCHI MN, 1988, J JAPAN SOC PRECISIO, V56, P1094
[6]
UNE A, 1987, P SPIE ELECTRON BEAM, P45