TWIN FORMATION AND AU SEGREGATION DURING ION-BEAM-INDUCED EPITAXY OF AMORPHOUS SI

被引：14

作者：

PRIOLO, F

BATSTONE, JL

POATE, JM

LINNROS, J

JACOBSON, DC

THOMPSON, MO

机构：

[1] AT&T BELL LABS,MURRAY HILL,NJ 07974

[2] CORNELL UNIV,ITHACA,NY 14853

来源：

APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 13期

关键词：

D O I：

10.1063/1.99204

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：1043 / 1045

页数：3

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