ELECTRON MICROSCOPIC INVESTIGATION OF TRANSVERSE SECTIONS OF THIN FILMS ON SOLID SUBSTRATES

被引：12
作者：
BACH, H
SCHRODER, H
机构：
[1] Jenaer Glaswerk Schott and Gen., Mainz
来源：
ZEITSCHRIFT FUR PHYSIK | 1969年 / 224卷 / 1-3期
关键词：
D O I：
10.1007/BF01392239
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
A method is described which allows to prepare transverse sections of thin films by means of an ion etching technique so that transmission electron micrographs of the film structure can be carried out. A section through a 6-layered optical film with a total thickness of 0.62 μm is shown as an example. © 1969 Springer-Verlag.
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页码：122 / &
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