A CHEMICAL MICROWAVE TECHNIQUE FOR THE MEASUREMENT OF BULK MINORITY-CARRIER LIFETIME IN SILICON-WAFERS

被引：28

作者：

LUKE, KL ^{[1
]}

CHENG, LJ ^{[1
]}

机构：

[1] CALTECH,JET PROP LAB,PASADENA,CA 91109

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 04期

关键词：

D O I：

10.1149/1.2095849

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：957 / 961

页数：5

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[9] AN RF BRIDGE TECHNIQUE FOR CONTACTLESS MEASUREMENT OF THE CARRIER LIFETIME IN SILICON-WAFERS [J].

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[10] SURFACE-CHEMISTRY OF HF PASSIVATED SILICON - X-RAY PHOTOELECTRON AND ION-SCATTERING SPECTROSCOPY RESULTS [J].

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