EFFECTS OF OXIDATION ON ELECTRICAL CHARACTERISTICS OF SILICON-ON-SAPPHIRE FILMS

被引：27

|

作者：

ROSS, EC

WARFIELD, G

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1969年 / 40卷 / 05期

关键词：

D O I：

10.1063/1.1657985

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2339 / &

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