共 50 条
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- [6] ELECTRON-BEAM PROXIMITY PRINTING OF HALF-MICRON DEVICES JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (06): : 1443 - 1447
- [7] PILOT PRODUCTION OF HALF-MICRON X-RAY MASKS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1989, 7 (06): : 1570 - 1574
- [8] ULTRAHIGH RESOLUTION POSITIVE WORKING PHOTORESIST FOR HALF-MICRON PHOTOLITHOGRAPHY ADVANCES IN RESIST TECHNOLOGY AND PROCESSING VI, 1989, 1086 : 352 - 356
- [9] HALF-MICRON CMOS ON ULTRA-THIN SILICON ON INSULATOR 1989 INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST, 1989, : 821 - 824