LASER-INDUCED TEMPERATURE DISTRIBUTION IN SUBSTRATES WITH PERIODIC MULTILAYER STRUCTURES

被引:8
作者
LU, YF [1 ]
机构
[1] NATL UNIV SINGAPORE,DEPT ELECT ENGN,SINGAPORE 0511,SINGAPORE
关键词
D O I
10.1063/1.354196
中图分类号
O59 [应用物理学];
学科分类号
摘要
A general model and analytical results have been derived to obtain laser-induced temperature rise in substrates with periodic multilayer structures. The substrate can be equivalent to a homogeneous substrate with anisotropic thermal conductivity, if the dimension of the periodic structure is much smaller than the laser spot size. The laser-induced temperature rise can be then obtained by solving the three-dimensional heat equation with the different thermal conductivities in directions parallel and perpendicular to the layer structure. This model has been applied to calculate the laser-induced temperature rise in Si and Mn-Zn ferrite composite materials. A different temperature rise can be obtained when a laser beam irradiates the substrate surface, which is oriented in parallel or perpendicular to the layer structure.
引用
收藏
页码:5761 / 5766
页数:6
相关论文
共 26 条
[1]   SOME CALCULATIONS OF TEMPERATURE PROFILES IN THIN-FILMS WITH LASER-HEATING [J].
ABRAHAM, E ;
HALLEY, JM .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1987, 42 (04) :279-285
[2]   HEAT-FLOW IN INTERFERENCE FILTERS [J].
ABRAHAM, E ;
OGILVY, IJM .
APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1987, 42 (01) :31-34
[3]  
BAUERLE D, 1986, CHEM PROCESSING LASE
[4]  
BAUERLE D, 1984, LASER PROCESSING DIA
[5]  
BOYD IW, 1989, BEAM PROCESSING LASE
[6]  
BOYD IW, 1989, PHOTON BEAM PLASMA A
[7]  
BOYD IW, 1987, LASER PROCESSING THI
[8]   HEAT TREATING AND MELTING MATERIAL WITH A SCANNING LASER OR ELECTRON-BEAM [J].
CLINE, HE ;
ANTHONY, TR .
JOURNAL OF APPLIED PHYSICS, 1977, 48 (09) :3895-3900
[9]   THERMAL EVOLUTION OF W/SI AND W/C MULTILAYERS UNDER PULSED LASER-HEATING AND CLASSICAL ANNEALING [J].
DUPUIS, V ;
RAVET, MF ;
TETE, C ;
PIECUCH, M .
APPLIED SURFACE SCIENCE, 1990, 46 (1-4) :398-404
[10]  
Ehrlich D.J., 1989, LASER MICROFABRICATI