MODELING OF A RF GLOW-DISCHARGE PLASMA

[1] LARGE-SIGNAL TIME-DOMAIN MODELING OF LOW-PRESSURE RF GLOW-DISCHARGES [J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (01) : 81 - 89

[2] NUMERICAL-MODEL OF RF GLOW-DISCHARGES [J]. PHYSICAL REVIEW A, 1987, 36 (06): : 2782 - 2792

[3] SELF-CONSISTENT SIMULATION OF A PARALLEL-PLATE RF DISCHARGE [J]. APPLIED PHYSICS LETTERS, 1988, 52 (01) : 21 - 23

[4] RADIATIVE LIFETIMES AND 2-BODY DEACTIVATION RATE CONSTANTS FOR AR(3P5, 4P) AND AR(3P5,4P') STATES [J]. JOURNAL OF CHEMICAL PHYSICS, 1978, 69 (09) : 3885 - 3897

[5] LASER DIAGNOSTICS OF PLASMA-ETCHING - MEASUREMENT OF CL2+ IN A CHLORINE DISCHARGE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (03): : 817 - 823

[6] EFFECTS OF FREQUENCY ON OPTICAL-EMISSION, ELECTRICAL, ION, AND ETCHING CHARACTERISTICS OF A RADIO-FREQUENCY CHLORINE PLASMA [J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (06) : 2135 - 2144

[7] Dutton J., 1975, Journal of Physical and Chemical Reference Data, V4, P577, DOI 10.1063/1.555525

[8] Ellis H. W., 1976, Atomic Data and Nuclear Data Tables, V17, P177, DOI 10.1016/0092-640X(76)90001-2

[9] TIME-RESOLVED OPTICAL DIAGNOSTICS OF RADIO-FREQUENCY PLASMAS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03): : 617 - 624

[10] FLUID MODEL SIMULATIONS OF A 13.56-MHZ RF DISCHARGE - TIME AND SPACE DEPENDENCE OF RATES OF ELECTRON-IMPACT EXCITATION [J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (01) : 88 - 94

[1] LARGE-SIGNAL TIME-DOMAIN MODELING OF LOW-PRESSURE RF GLOW-DISCHARGES [J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (01) : 81 - 89

[2] NUMERICAL-MODEL OF RF GLOW-DISCHARGES [J]. PHYSICAL REVIEW A, 1987, 36 (06): : 2782 - 2792

[3] SELF-CONSISTENT SIMULATION OF A PARALLEL-PLATE RF DISCHARGE [J]. APPLIED PHYSICS LETTERS, 1988, 52 (01) : 21 - 23

[4] RADIATIVE LIFETIMES AND 2-BODY DEACTIVATION RATE CONSTANTS FOR AR(3P5, 4P) AND AR(3P5,4P') STATES [J]. JOURNAL OF CHEMICAL PHYSICS, 1978, 69 (09) : 3885 - 3897

[5] LASER DIAGNOSTICS OF PLASMA-ETCHING - MEASUREMENT OF CL2+ IN A CHLORINE DISCHARGE [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (03): : 817 - 823

[6] EFFECTS OF FREQUENCY ON OPTICAL-EMISSION, ELECTRICAL, ION, AND ETCHING CHARACTERISTICS OF A RADIO-FREQUENCY CHLORINE PLASMA [J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (06) : 2135 - 2144

[7] Dutton J., 1975, Journal of Physical and Chemical Reference Data, V4, P577, DOI 10.1063/1.555525

[8] Ellis H. W., 1976, Atomic Data and Nuclear Data Tables, V17, P177, DOI 10.1016/0092-640X(76)90001-2

[9] TIME-RESOLVED OPTICAL DIAGNOSTICS OF RADIO-FREQUENCY PLASMAS [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03): : 617 - 624

[10] FLUID MODEL SIMULATIONS OF A 13.56-MHZ RF DISCHARGE - TIME AND SPACE DEPENDENCE OF RATES OF ELECTRON-IMPACT EXCITATION [J]. JOURNAL OF APPLIED PHYSICS, 1987, 62 (01) : 88 - 94