CONTINUOUS ELLIPSOMETRIC DETERMINATION OF OPTICAL CONSTANTS AND THICKNESS OF A SILVER FILM DURING DEPOSITION

被引：33
作者：
YAMAGUCHI, T
YOSHIDA, S
KINBARA, A
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1969年 / 8卷 / 05期
关键词：
D O I：
10.1143/JJAP.8.559
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：559 / +
页数：1
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