A Subwavelength-Grating-Mirror-Based MEMS Tunable Fabry-Perot Filter for Hyperspectral Infrared Imaging

被引:4
作者
Mao, Haifeng [1 ]
Dong, Xianshan [2 ]
Liu, Yihui [3 ]
机构
[1] Southeast Univ, Sch Elect Sci & Engn, Key Lab MEMS Minist Educ, Nanjing, Peoples R China
[2] Minist Ind & Informat Technol, Sci & Technol Reliabil Physicsand Applicat Technol, No 5Electron Res Inst, Guangzhou 511370, Peoples R China
[3] Nanjing Univ Aeronaut & Astronaut, Sch Int Studies, Nanjing, Peoples R China
基金
中国国家自然科学基金;
关键词
Mirrors; Gratings; Fabry-Perot; Hyperspectral imaging; Bandwidth; Micromechanical devices; Optical filters; Fabry-Perot filter; subwavelength grating mirror; distributed Bragg reflector; MEMS; hyperspectral infrared imaging; BROAD-BAND; WAVE; FABRICATION; REFLECTORS;
D O I
10.1109/JMEMS.2022.3215939
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper reports on the first demonstration of a MEMS tunable hyperspectral Fabry-Perot filter based on a suspended tensile-strained single-layer dielectric two-dimensional subwavelength grating (2-D SWG) mirror. Rigorous coupled-wave analysis is used to design the 2-D SWG mirror, and the fab-ricated mirror demonstrates a very high reflectivity of 98.7-99.3% over a broad wavelength range of 500 nm (2.0-2.5 mu m), which represents an unprecedented fractional bandwidth A1/1c of 23%. The surface profiles of the actuated 2-D SWG mirror are examined for the first time. The movable SWG mirror shows nanometer-scale surface flatness across an 800-mu m dimension area both at static state and during actuation. Moreover, a proof-of-concept MEMS tunable hyperspectral shortwave infrared Fabry-Perot filter based on a top suspended 2-D SWG mirror and a bottom 3-pair Si/SiO2 DBR has been fabricated. With an actuation voltage of 15 V, a large wavelength tuning range of 210 nm from 2.51 mu m to 2.3 mu m has been achieved. In addition, over the entire actuation range the tunable filter exhibits peak transmission higher than 70% with an extremely narrow full-width at half-maximum of 6 nm. This spectral resolution is one order of magnitude higher than that of the previously reported DBR-based tunable Fabry-Perot filters and fulfills the optical requirement of 81/1c < 1% for hyperspectral infrared imaging applications. Overall, the presented 2-D SWG mirror based tunable filter shows a high figure-of-merit (tuning range / linewidth) of 35, which is a more than 40% increase compared to those of DBR-based tunable filters.
引用
收藏
页码:57 / 66
页数:10
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