AN ANALYSIS OF SURFACE-ACOUSTIC-WAVE DEVICES ON LAYERED SUBSTRATES

被引：0

作者：

KOSHIBA, M

OHBUCHI, K

机构：

[1] Department of Electronic Engineering, Hokkaido University, Sapporo

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1992年 / 31卷

关键词：

SAW; INTERDIGITAL TRANSDUCER; SAW GRATING REFLECTOR; COUPLED MODE THEORY; FINITE-ELEMENT METHOD;

D O I：

10.7567/JJAPS.31S1.213

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A unified approach based on the coupled mode theory and the finite-element method for the analysis of SAW devices on layered substrates is described. In this approach, all the parameters included in the coupled mode equations can be theoretically determined, and all of the effects of piezoelectric perturbation, mechanical perturbation, and energy storage due to evanescent bulk waves are taken into account. Examples are computed for various types of SAW gratings and one-port cavity resonators on layered substrates. The computed results approximately agree with the experimental results.

引用

页码：213 / 215

页数：3

共 7 条

[1]

CHEN DP, 1985, IEEE T SON ULTRASON, V32, P395, DOI 10.1109/T-SU.1985.31609

[2]

Datta S., 1983, 1983 Ultrasonics Symposium Proceedings, P362

[3] FINITE-ELEMENT SOLUTION OF PERIODIC WAVE-GUIDES FOR ACOUSTIC-WAVES [J].

KOSHIBA, M ;

MITOBE, S ;

SUZUKI, M .

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1987, 34 (04) :472-477

[4] AN ANALYSIS OF SURFACE-ACOUSTIC-WAVE DEVICES USING COUPLING-OF-MODE THEORY AND FINITE-ELEMENT METHOD [J].

KOSHIBA, M ;

OHBUCHI, K .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 :140-142

[5]

Martin S. J., 1982, 1982 Ultrasonics Symposium Proceedings, P290, DOI 10.1109/ULTSYM.1982.197831

[6]

Takeuchi M., 1985, Transactions of the Institute of Electronics and Communication Engineers of Japan, Part C, VJ68C, P709

[7]

VELLEKOOP MJ, 1987, P IEEE ULTRASONICS S, P641

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