THEORY AND PRACTICE OF RF SPUTTERING

被引：29

作者：

DAVIDSE, PD

机构：

来源：

VACUUM | 1967年 / 17卷 / 03期

关键词：

D O I：

10.1016/0042-207X(67)93142-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：139 / &

共 22 条

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