LASER PROJECTION PATTERNED ALUMINUM METALLIZATION FOR INTEGRATED-CIRCUIT APPLICATIONS

被引：42
作者：
BLONDER, GE
HIGASHI, GS
FLEMING, CG
机构：
来源：
APPLIED PHYSICS LETTERS | 1987年 / 50卷 / 12期
关键词：
D O I：
10.1063/1.98039
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：766 / 768
页数：3
相关论文
共 10 条
[1]  
COOKE MJ, 1982, SOLID STATE TECHNOL, V25, P62
[2]   ONE-STEP REPAIR OF TRANSPARENT DEFECTS IN HARD-SURFACE PHOTOLITHOGRAPHIC MASKS VIA LASER PHOTODEPOSITION [J].
EHRLICH, DJ ;
OSGOOD, RM ;
SILVERSMITH, DJ ;
DEUTSCH, TF .
ELECTRON DEVICE LETTERS, 1980, 1 (06) :101-103
[3]   ALUMINUM FILMS PREPARED BY METAL ORGANIC LOW-PRESSURE CHEMICAL VAPOR-DEPOSITION [J].
GREEN, ML ;
LEVY, RA ;
NUZZO, RG ;
COLEMAN, E .
THIN SOLID FILMS, 1984, 114 (04) :367-377
[4]   PATTERNED ALUMINUM GROWTH VIA EXCIMER LASER ACTIVATED METALORGANIC CHEMICAL VAPOR-DEPOSITION [J].
HIGASHI, GS ;
FLEMING, CG .
APPLIED PHYSICS LETTERS, 1986, 48 (16) :1051-1053
[5]   WAFER-SCALE LASER PANTOGRAPHY .3. FABRICATION OF NORMAL-METAL-OXIDE-SEMICONDUCTOR TRANSISTORS AND SMALL-SCALE INTEGRATED-CIRCUITS BY DIRECT-WRITE LASER-INDUCED PYROLYTIC REACTIONS [J].
MCWILLIAMS, BM ;
HERMAN, IP ;
MITLITSKY, F ;
HYDE, RA ;
WOOD, LL .
APPLIED PHYSICS LETTERS, 1983, 43 (10) :946-948
[6]   VISIBLE-LASER REPAIR OF CLEAR DEFECTS IN PHOTOMASKS [J].
OPRYSKO, MM ;
BERANEK, MW ;
YOUNG, PL .
IEEE ELECTRON DEVICE LETTERS, 1985, 6 (07) :344-346
[7]   REPAIR OF X-RAY-LITHOGRAPHY MASKS USING UV-LASER PHOTODEPOSITION [J].
RANDALL, JN ;
EHRLICH, DJ ;
TSAO, JY .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01) :262-264
[8]   PATTERNED PHOTONUCLEATION OF CHEMICAL VAPOR-DEPOSITION OF AL BY UV-LASER PHOTODEPOSITION [J].
TSAO, JY ;
EHRLICH, DJ .
APPLIED PHYSICS LETTERS, 1984, 45 (06) :617-619
[9]   DIRECT-WRITE METALLIZATION OF SILICON MOSFETS USING LASER PHOTODEPOSITION [J].
TSAO, JY ;
EHRLICH, DJ ;
SILVERSMITH, DJ ;
MOUNTAIN, RW .
ELECTRON DEVICE LETTERS, 1982, 3 (06) :164-166
[10]   PHOTOTHERMAL EFFECT CONTRIBUTION ON FILM QUALITY IMPROVEMENT IN EXCIMER-LASER INDUCED METAL CVD [J].
YOKOYAMA, H ;
UESUGI, F ;
KISHIDA, S ;
WASHIO, K .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1985, 37 (01) :25-30
1