MICROSTRUCTURE AND THERMAL-STABILITY OF A-SI1-XNXH FILMS

被引：0
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作者：
AIVAZOV, AA
BUGADYAN, BG
SAZONOV, AY
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INORGANIC MATERIALS | 1993年 / 29卷 / 07期
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T [工业技术];
学科分类号：
08 ;
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页码：1078 / 1081
页数：4
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