MICROSTRUCTURE AND THERMAL-STABILITY OF A-SI1-XNXH FILMS

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作者：

AIVAZOV, AA

BUGADYAN, BG

SAZONOV, AY

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INORGANIC MATERIALS | 1993年 / 29卷 / 07期

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T [工业技术];

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08 ;

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页码：1078 / 1081

页数：4

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