OXYGEN PASSIVATIONS OF STAINLESS-STEEL FOR ADVANCED SEMICONDUCTOR MANUFACTURING

被引：0
|
作者：
HAMADA, H
OHMI, T
NAKAHARA, Y
机构：
来源：
PROCEEDINGS - MICROCONTAMINATION 89 : CONFERENCE AND EXPOSITION | 1989年
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D O I：
暂无
中图分类号：
O69 [应用化学];
学科分类号：
081704 ;
摘要：
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页码：351 / 357
页数：7
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