OXYGEN PASSIVATIONS OF STAINLESS-STEEL FOR ADVANCED SEMICONDUCTOR MANUFACTURING

被引：0

作者：

HAMADA, H

OHMI, T

NAKAHARA, Y

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中图分类号：

O69 [应用化学];

学科分类号：

081704 ;

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引用

页码：351 / 357

页数：7

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