STRONG PIEZOELECTRICITY IN NANOSIZED SILICON-NITRIDE PREPARED BY LASER-INDUCED CHEMICAL VAPOR-DEPOSITION

被引：20
|
作者：
WANG, WX
LI, DH
LIU, ZC
LIU, SH
机构：
[1] UNIV SCI & TECHNOL CHINA,STRUCT RES LAB,HEFEI 230026,PEOPLES R CHINA
[2] S CHINA NORMAL UNIV,CANTON 510631,PEOPLES R CHINA
来源：
APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 03期
关键词：
D O I：
10.1063/1.108946
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
It has been found for the first time that laser-induced chemical vapor deposition (LICVD) processed nano-Si3N4 Possesses strong piezoelectric effects. The piezoelectricity of LICVD nano-Si3N4 stems from the charge accumulation in the interfaces and the surfaces of microvoids.
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页码：321 / 322
页数：2
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