RESONANT SILICON STRUCTURES

被引：38

作者：

BUSER, RA

DEROOIJ, NF

机构：

来源：

SENSORS AND ACTUATORS | 1989年 / 17卷 / 1-2期

关键词：

D O I：

10.1016/0250-6874(89)80074-5

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：145 / 154

页数：10

共 22 条

[1] NONLINEAR VIBRATIONS AND HYSTERESIS OF MICROMACHINED SILICON RESONATORS DESIGNED AS FREQUENCY-OUT SENSORS [J].

ANDRES, MV ;

FOULDS, KWH ;

TUDOR, MJ .

ELECTRONICS LETTERS, 1987, 23 (18) :952-954

[2]

BUSER R, IN PRESS

[3]

BUSER RA, 1986, OCT FALL M EL SOC SA, P879

[4] AIR AND GAS DAMPING OF QUARTZ TUNING FORKS [J].

CHRISTEN, M .

SENSORS AND ACTUATORS, 1983, 4 (04) :555-564

[5]

ERNISSE EP, 1986, 40TH ANN FREQ CONTR, P216

[6] ETCHED SILICON VIBRATING SENSOR [J].

GREENWOOD, JC .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1984, 17 (08) :650-652

[7] APPLICATIONS OF PIEZOELECTRIC CRYSTAL DETECTOR IN ANALYTICAL-CHEMISTRY [J].

HLAVAY, J ;

GUILBAULT, GG .

ANALYTICAL CHEMISTRY, 1977, 49 (13) :1890-1898

[8] RESONANT-MICROBRIDGE VAPOR SENSOR [J].

HOWE, RT ;

MULLER, RS .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1986, 33 (04) :499-506

[9] A BENDING AND STRETCHING MODE CRYSTAL-OSCILLATOR AS A FRICTION VACUUM GAUGE [J].

KOKUBUN, K ;

HIRATA, M ;

MURAKAMI, H ;

TODA, Y ;

ONO, M .

VACUUM, 1984, 34 (8-9) :731-735

[10] FREQUENCY-DEPENDENCE OF A QUARTZ OSCILLATOR ON GAS-PRESSURE [J].

KOKUBUN, K ;

HIRATA, M ;

ONO, M ;

MURAKAMI, H ;

TODA, Y .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2184-2187

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