SUB-MICRON RESOLUTION DEEP UV PHOTOLITHOGRAPHY

被引：2
|
作者：
VOSHCHENKOV, AM
HERRMANN, H
机构：
来源：
ELECTRONICS LETTERS | 1981年 / 17卷 / 02期
关键词：
D O I：
10.1049/el:19810044
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：61 / 62
页数：2
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