DEPTH DISCRIMINATION IN SCANNED HETERODYNE MICROSCOPE SYSTEMS

被引：12
作者：
SOMEKH, MG
机构：
[1] Department of Electrical and Electronic Engineering, University of Nottingham, Nottingham
来源：
JOURNAL OF MICROSCOPY-OXFORD | 1992年 / 168卷
关键词：
SCANNING OPTICAL MICROSCOPE; HETERODYNE; OPTICAL TRANSFER FUNCTION; INTERFEROMETRY; EXTENDED FOCUS;
D O I：
10.1111/j.1365-2818.1992.tb03257.x
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
The optical transfer function of several scanning microscope systems is derived, using a physically intuitive approach. The technique allows a wide range of systems to be modelled with only minor modifications to the basic formulation. The results are then used to determine the response of various scanning microscopes for objects both in and out of the focal plane. The possibility of performing extended-focus phase imaging in heterodyne microscopes by scanning the sample along the optical axis is also examined. This mode of operation should allow measurements of minute topographical and phase variations on tilted or warped samples with the same lateral resolution as would be obtained when the sample is in focus throughout the entire scan.
引用
收藏
页码：131 / 151
页数：21
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