POLYSILICON STRAIN-GAUGE TRANSDUCERS

被引：8

作者：

GRIDCHIN, VA

LUBIMSKYI, VM

SARINA, MP

机构：

[1] Department of Applied Physics, Novosibirsk Institute of Electrical Engineering, Novosibirsk

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1992年 / 30卷 / 03期

关键词：

D O I：

10.1016/0924-4247(92)80124-L

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Strain-gauge transducers with polysilicon resistors can be used successfully in various sensors. They have some advantages in comparison to monocrystalline silicon strain-gauge transducers. However, not enough information is available for the qualitative design of such transducers. The theoretical principles of the temperature dependence of the output signal for a constant supply voltage and constant supply current are described. A polysilicon strain-gauge transducer with a square diaphragm fabricated on the discussed principles is reported. It has an operating temperature range of -190- + 300-degrees-C, and weak temperature dependence of the output signal.

引用

页码：219 / 223

页数：5

共 50 条

[1] STRAIN-GAUGE TRANSDUCERS
KNIGHT, AL
ENGINEERING MATERIALS AND DESIGN, 1977, 21 (02): : 54 - 56
[2] STRAIN-GAUGE PRESSURE TRANSDUCERS
CHUBRIK, SS
BORSHCHE.SP
RYLOV, NA
MEASUREMENT TECHNIQUES, 1974, 17 (03) : 379 - 380
[3] CONSTRUCTION OF IMPLANTABLE STRAIN-GAUGE TRANSDUCERS
RAYNER, V
JOURNAL OF PHYSIOLOGY-LONDON, 1977, 273 (02): : P1 - P2
[4] STRAIN-GAUGE AND PIEZORESISTIVE PRESSURE TRANSDUCERS
不详
MEASUREMENTS & CONTROL, 1994, (164): : 199 - 210
[5] STRAIN-GAUGE AND PIEZORESISTIVE PRESSURE TRANSDUCERS
HODGES, B
MEASUREMENTS & CONTROL, 1995, (170): : 243 - 256
[6] USING STRAIN-GAUGE PRESSURE TRANSDUCERS
SHAPIRO, BH
PLANT ENGINEERING, 1977, 31 (03) : 69 - 71
[7] AN OVERSAMPLING CONVERTER FOR STRAIN-GAUGE TRANSDUCERS
KERTH, DA
PIASECKI, DS
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1992, 27 (12) : 1689 - 1696
[8] SEMICONDUCTOR STRAIN-GAUGE TRANSDUCERS TYPE SAPFIR
KENIGSBERG, VL
STUCHEBNIKOV, VM
SERDYUKOV, VI
EVDOKIMOV, VI
SUKHODOLETS, VK
MILMAN, SI
MEASUREMENT TECHNIQUES, 1978, 21 (10) : 1457 - 1460
[9] ACCOUNTING FOR TRANSVERSE SENSITIVITY OF STRAIN-GAUGE TRANSDUCERS
CHIRIMANOV, VP
MEASUREMENT TECHNIQUES-USSR, 1966, (02): : 182 - +
[10] THIN-FILM STRAIN-GAUGE TRANSDUCERS
BETHE, K
SCHON, D
PHILIPS TECHNICAL REVIEW, 1980, 39 (3-4): : 94 - 101

← 1 2 3 4 5 →