ANODIC-OXIDATION OF GAP IN N-METHYLACETAMIDE FOR ELECTRICAL PROFILING OF ION-IMPLANTED GAP

被引：6
作者：
INADA, T
OHNUKI, Y
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1980年 / 127卷 / 01期
关键词：
D O I：
10.1149/1.2129641
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
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页码：68 / 74
页数：7
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