PLASMA OXIDATION OF GAAS

被引:0
作者
CHANG, RPH [1 ]
机构
[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974
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D O I
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中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:C132 / C132
页数:1
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