EPITAXIAL GROWTH OF GE LAYERS ON SI SUBSTRATES BY VACUUM EVAPORATION

被引:11
|
作者
ITO, K
TAKAHASHI, K
机构
关键词
D O I
10.1143/JJAP.7.821
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:821 / +
页数:1
相关论文
共 50 条
  • [21] EPITAXIAL-GROWTH OF PLATINUM SILICIDE LAYERS ON (111) SI SUBSTRATES
    CHEN, JR
    HEH, TS
    LIN, MP
    SURFACE SCIENCE, 1985, 162 (1-3) : 657 - 662
  • [22] High-temperature microhardness of SiGe epitaxial layers grown on Ge and Si substrates
    Mezhennyi, MV
    Mil'vidskii, MG
    Yugova, TG
    JOURNAL OF PHYSICS-CONDENSED MATTER, 2002, 14 (48) : 12997 - 13001
  • [23] THE HETEROEPITAXY OF GE ON SI(100) BY VACUUM EVAPORATION
    OHMACHI, Y
    NISHIOKA, T
    SHINODA, Y
    JOURNAL OF APPLIED PHYSICS, 1983, 54 (09) : 5466 - 5469
  • [24] Epitaxial growth of Ge thick layers on nominal and 6° off Si(001); Ge surface passivation by Si
    Hartmann, J. M.
    Abbadie, A.
    Cherkashin, N.
    Grampeix, H.
    Clavelier, L.
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2009, 24 (05)
  • [25] Epitaxial growth of Ge thick layers on nominal and 6°off Si(001); Ge surface passivation by Si
    Hartmann, J. M.
    Grampeix, H.
    Clavelier, L.
    SIGE, GE, AND RELATED COMPOUNDS 3: MATERIALS, PROCESSING, AND DEVICES, 2008, 16 (10): : 583 - 590
  • [26] Epitaxial growth of Mg2Si films on (111) Si substrates covered with epitaxial SiC layers
    Katagiri, Atsuo
    Ogawa, Shota
    Shimizu, Takao
    Matsushima, Masaaki
    Akiyama, Kensuke
    Uchida, Hiroshi
    Funakubo, Hiroshi
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2020, 59
  • [27] Epitaxial growth and photoluminescence of Si/pure-Ge/Si quantum structures on Si(311) substrates
    Amano, K
    Kobayashi, M
    Ohga, A
    Hattori, T
    Usami, N
    Shiraki, Y
    SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1998, 13 (11) : 1277 - 1283
  • [28] Epitaxial growth and anisotropic strain relaxation of Ge1-xSnx layers on Ge(110) substrates
    Asano, Takanori
    Shimura, Yosuke
    Taoka, Noriyuki
    Nakatsuka, Osamu
    Zaima, Shigeaki
    SOLID-STATE ELECTRONICS, 2013, 83 : 71 - 75
  • [29] Epitaxial Growth and Crystalline Properties of Ge1-x-ySixSny Layers on Ge(001) Substrates
    Asano, T.
    Terashima, T.
    Yamaha, T.
    Kurosawa, M.
    Takeuchi, W.
    Taoka, N.
    Nakatsuka, O.
    Zaima, S.
    2014 7TH INTERNATIONAL SILICON-GERMANIUM TECHNOLOGY AND DEVICE MEETING (ISTDM), 2014, : 159 - 160
  • [30] OMVPE growth of undoped and Si-doped GaAs epitaxial layers on Ge
    Modak, P
    Hudait, MK
    Hardikar, S
    Krupanidhi, SB
    JOURNAL OF CRYSTAL GROWTH, 1998, 193 (04) : 501 - 509