EPITAXIAL GROWTH OF GE LAYERS ON SI SUBSTRATES BY VACUUM EVAPORATION

被引:11
|
作者
ITO, K
TAKAHASHI, K
机构
关键词
D O I
10.1143/JJAP.7.821
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:821 / +
页数:1
相关论文
共 50 条
  • [1] THE GROWTH AND CHARACTERIZATION OF GE AND GAAS EPITAXIAL LAYERS ON SI SUBSTRATES
    AWAL, MA
    LEE, EH
    CHAN, EY
    SHENG, TT
    CELLER, GK
    JOURNAL OF ELECTRONIC MATERIALS, 1986, 15 (05) : 299 - 299
  • [2] HETERO-EPITAXIAL GROWTH OF GE ON (111) SI BY VACUUM EVAPORATION
    GAROZZO, M
    CONTE, G
    EVANGELISTI, F
    VITALI, G
    APPLIED PHYSICS LETTERS, 1982, 41 (11) : 1070 - 1072
  • [3] Ge instability and the growth of Ge epitaxial layers in nanochannels on patterned Si (001) substrates
    Wang, G.
    Rosseel, E.
    Loo, R.
    Favia, P.
    Bender, H.
    Caymax, M.
    Heyns, M. M.
    Vandervorst, W.
    JOURNAL OF APPLIED PHYSICS, 2010, 108 (12)
  • [4] Epitaxial growth of GeSn layers on (001), (110), and (111) Si and Ge substrates
    Nakatsuka, Osamu
    Taoka, Noriyuki
    Asano, Takanori
    Yamaha, Takashi
    Kurosawa, Masashi
    Takeuchi, Wakana
    Zaima, Shigeaki
    SIGE, GE, AND RELATED COMPOUNDS 6: MATERIALS, PROCESSING, AND DEVICES, 2014, 64 (06): : 793 - 799
  • [5] FORMATION OF EPITAXIAL LAYERS OF GE ON SI SUBSTRATES BY GE IMPLANTATION AND OXIDATION
    FATHY, D
    HOLLAND, OW
    WHITE, CW
    APPLIED PHYSICS LETTERS, 1987, 51 (17) : 1337 - 1339
  • [6] Epitaxial growth of Ge and SiGe on Si substrates
    Larsen, Arne Nylandsted
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2006, 9 (4-5) : 454 - 459
  • [7] Magnetotransport of epitaxial Si/Ge layers on Si
    Koschinski, W
    Dettmer, K
    Kessler, FR
    JOURNAL OF CRYSTAL GROWTH, 1995, 157 (1-4) : 85 - 89
  • [8] Magnetotransport of epitaxial Si/Ge layers on Si
    Technische Universitaet Braunschweig, Braunschweig, Germany
    J Cryst Growth, 1-4 (85-89):
  • [9] High quality Ge epitaxial layers in narrow channels on Si (001) substrates
    Wang, G.
    Rosseel, E.
    Loo, R.
    Favia, P.
    Bender, H.
    Caymax, M.
    Heyns, M. M.
    Vandervorst, W.
    APPLIED PHYSICS LETTERS, 2010, 96 (11)
  • [10] GROWTH AND DEFECT STRUCTURE OF CDS EPITAXIAL LAYERS ON (111)GE SUBSTRATES
    GHEZZI, C
    PAORICI, C
    PELOSI, C
    SERVIDORI, M
    JOURNAL OF CRYSTAL GROWTH, 1977, 41 (02) : 181 - 191