Nanoscopic detection of the thermal conductivity of compound semiconductor materials by enhanced scanning thermal microscopy

被引：0

作者：

Balk, LJ ^{[1
]}

Maywald, M ^{[1
]}

Pylkki, RJ ^{[1
]}

机构：

[1] TOPOMETRIX,SANTA CLARA,CA 95054

来源：

MICROSCOPY OF SEMICONDUCTING MATERIALS 1995 | 1995年 / 146卷

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work, applications of nanoscopic thermal experiments have been demonstrated. These include investigations of diode contact areas as well as the localisation of doped material. Furthermore, an example of depth profiling is given.

引用

页码：655 / 658

页数：4

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