A THERMALIZED ION EXPLOSION MODEL FOR HIGH-ENERGY SPUTTERING AND TRACK REGISTRATION

被引：139

作者：

SEIBERLING, LE

GRIFFITH, JE

TOMBRELLO, TA

机构：

来源：

RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1980年 / 52卷 / 3-4期

关键词：

Compendex;

D O I：

10.1080/00337578008210033

中图分类号：

TL [原子能技术]; O571 [原子核物理学];

学科分类号：

0827 ; 082701 ;

摘要：

Sputtering

引用

页码：201 / 209

页数：9

共 28 条

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