NEW INFRARED-ABSORPTION BANDS IN HYDROGEN-IMPLANTED SILICON

被引:31
作者
MUKASHEV, BN
NUSSUPOV, KH
TAMENDAROV, MF
机构
[1] Institute of High Energy Physics, the Academy of Sciences of the Kazakh SSR, Alma-Ata
关键词
D O I
10.1016/0375-9601(79)90503-6
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
New vibrational modes of silicon-hydrogen complexes in the stretching (∼2000 cm-1), bending (∼900 cm-1 and wagging (∼600 cm-1 regions are resolved in hydrogen-implanted silicon. Further detailed studies are required to indentity hydrogen-associated bands corresponding to SiH or SiHn groupings. © 1979.
引用
收藏
页码:381 / 383
页数:3
相关论文
共 12 条
[1]  
BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556
[2]   STUDY OF DIVACANCY IN IRRADIATED SILICON USING INFRARED SPECTROSCOPY AND INFRARED PHOTOCONDUCTIVITY MEASUREMENTS [J].
CORELLI, JC ;
YOUNG, RC ;
CHEN, CS .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1970, NS17 (06) :128-&
[3]   ISOLATION OF JUNCTION DEVICES IN GAAS USING PROTON BOMBARDMENT [J].
FOYT, AG ;
LINDLEY, WT ;
WOLFE, CM ;
DONNELLY, JP .
SOLID-STATE ELECTRONICS, 1969, 12 (04) :209-&
[4]   INFRARED-ABSORPTION OF SILICON IRRADIATED BY PROTONS [J].
GERASIMENKO, NN ;
ROLLE, M ;
CHENG, LJ ;
LEE, YH ;
CORELLI, JC ;
CORBETT, JW .
PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1978, 90 (02) :689-695
[5]   EPR OF CONDUCTION ELECTRONS PRODUCED IN SILICON BY HYDROGEN-ION IMPLANTATION [J].
GORELKINSKII, YV ;
SIGLE, VO ;
TAKIBAEV, ZS .
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1974, 22 (01) :K55-K57
[6]  
KIMERLING LC, 1975, I PHYS C SER, V23, P126
[7]  
KLEINHENZ RL, 1978, C DEFECTS RAD EFFECT
[8]   SHALLOW DONOR FORMATION IN SI PRODUCED BY PROTON BOMBARDMENT [J].
OHMURA, Y ;
ZOHTA, Y ;
KANAZAWA, M .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1973, 15 (01) :93-98
[9]   ELECTRICAL PROPERTIES OF N-TYPE SI LAYERS DOPED WITH PROTON BOMBARDMENT INDUCED SHALLOW DONORS [J].
OHMURA, Y ;
ZOHTA, Y ;
KANAZAWA, M .
SOLID STATE COMMUNICATIONS, 1972, 11 (01) :263-&
[10]  
PICRAUX ST, 1978, C DEFECTS RAD EFFECT