AUTOMATIC CALIBRATION METHOD FOR PHASE-SHIFT SHADOW MOIRE INTERFEROMETRY

被引：24
|
作者：
DIRCKX, JJJ
DECRAEMER, WF
机构：
[1] University of Antwerp-RUCA, Department of Experimental Physics, Antwerp
来源：
APPLIED OPTICS | 1990年 / 29卷 / 10期
关键词：
D O I：
10.1364/AO.29.001474
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A new calibration procedure for phase shift moire interferometry is proposed. The method does not ask for a high precision machined calibration object and makes use only of the moire setup itself. The procedure is fast and fully automatic. The fringe plane distance λ was determined with a precision of 1.3%. We present control measurements on a plane surface and a perfect sphere confirming the value and the precision of λ. © 1990 Optical Society of America.
引用
收藏
页码：1474 / 1476
页数：3
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