ESR SIGNATURES OF DEFECTS NEAR SI-SIO2 INTERFACE

被引：3

作者：

POINDEXTER, EH ^{[1
]}

HELBERT, JN ^{[1
]}

WAGNER, BE ^{[1
]}

CAPLAN, PJ ^{[1
]}

机构：

[1] USA,ELECTR COMMAND,FT MONMOUTH,NJ 07703

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1977年 / 24卷 / 09期

关键词：

D O I：

10.1109/T-ED.1977.18979

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1217 / 1217

页数：1

共 50 条

[21] ELECTRON-PARAMAGNETIC RESONANCE STUDIES OF SI-SIO2 INTERFACE DEFECTS
BROWER, KL
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1989, 4 (12) : 970 - 979
[22] DEFECTS CREATED BY IMPLANTATION OF SILICON IONS IN P-TYPE SILICON NEAR AN SI-SIO2 INTERFACE
GALKIN, GN
VAVILOV, VS
ABBASOVA, RU
BOBROVA, EA
SOVIET PHYSICS SEMICONDUCTORS-USSR, 1981, 15 (09): : 1017 - 1020
[23] INDIVIDUAL INTERFACE TRAPS AT THE SI-SIO2 INTERFACE
MUELLER, HH
SCHULZ, M
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 1994, 5 (06) : 329 - 338
[24] INDIVIDUAL INTERFACE TRAPS AT THE SI-SIO2 INTERFACE
MUELLER, HH
SCHULZ, M
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 1995, 6 (02) : 65 - 74
[25] CYCLING OF DEFECTS BETWEEN TRAPPED NEGATIVE CHARGE AND INTERFACE STATES AT THE SI-SIO2 INTERFACE
SUNG, JM
LYON, SA
APPLIED PHYSICS LETTERS, 1987, 50 (17) : 1152 - 1154
[26] SPATIAL AND ENERGETIC DISTRIBUTION OF SI-SIO2 NEAR-INTERFACE STATES
LAKHDARI, H
VUILLAUME, D
BOURGOIN, JC
PHYSICAL REVIEW B, 1988, 38 (18): : 13124 - 13132
[27] OPTICAL MODELING OF SI-SIO2 INTERFACE
KALNITSKY, A
TAY, SP
ELLUL, JP
CHOGSAWANGVIROD, S
IRENE, EA
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1988, 135 (08) : C362 - C363
[28] IMPROVED CHARACTERIZATION OF THE SI-SIO2 INTERFACE
SU, P
SHER, A
TSUO, YH
MORIARTY, JA
MILLER, WE
APPLIED PHYSICS LETTERS, 1980, 36 (12) : 991 - 993
[29] Precipitation of Fe at the Si-SiO2 interface
Wong-Leung, J.
Eaglesham, D.J.
Sapjeta, J.
Jacobson, D.C.
Poate, J.M.
Williams, J.S.
Journal of Applied Physics, 1998, 83 (01):
[30] CHEMISTRY AND MORPHOLOGY OF THE SI-SIO2 INTERFACE
HELMS, CR
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1980, 179 (MAR): : 5 - COLL

← 1 2 3 4 5 →