EFFECTS OF HEAT-TREATMENT ON THE SENSITIVITY OF WARM CARRIER DEVICES FOR CH3OH LASER-RADIATION

被引：1

作者：

YASUOKA, Y

SHIMIZU, T

HARAKAWA, K

GAMO, K

NAMBA, S

机构：

[1] NAGASAKI INST APPL SCI,NAGASAKI 85101,JAPAN

[2] OSAKA UNIV,FAC ENGN SCI,TOYONAKA,OSAKA 560,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 3A期

关键词：

WARM CARRIER DEVICE; INFRARED DETECTOR AND MIXER; FOCUSED ION BEAM; MICROFABRICATION; CH3OH LASER;

D O I：

10.1143/JJAP.32.1128

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Warm carrier infrared laser detectors, which have 0.1 mum-diameter ohmic contact electrode, were fabricated using a focused ion beam, and the effects of heat treatment on the detection sensitivity of the devices were studied at the CH3OH laser frequency. It was found that the sensitivity of the device increased by 100 times with heat treatment at 450-degrees-C.

引用

页码：1128 / 1129

页数：2

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