ELECTRICAL-CONDUCTION IN IMPLANTED POLYCRYSTALLINE SILICON

被引：10

|

作者：

ANDREWS, JM

机构：

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1979年 / 8卷 / 03期

关键词：

D O I：

10.1007/BF02655625

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

收藏

页码：227 / 247

页数：21

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