Organic Static Induction Transistors with Nano-Hole Arrays Fabricated by Colloidal Lithography

被引:20
作者
Fujimoto, Kiyoshi [1 ]
Hiroi, Takaaki [2 ]
Nakamura, Masakazu [2 ]
机构
[1] Japan Chem Innovat Inst, Rewritable Paper Project, Inage Ku, 1-33 Yayoi Cho, Chiba 2638522, Japan
[2] Chiba Univ, Dept Elect & Mech Engn, Inage Ku, Chiba 2638522, Japan
关键词
nano structure chemistry; processing and fabrication; transistor; self-assembly;
D O I
10.1380/ejssnt.2005.327
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Organic static induction transistors (SITs) with nano-hole arrays in a lateral direction was fabricated using a 'colloidal lithography' technique. Positively charged polystyrene particles of 200 nm diameter as a deposition mask were adsorbed on a glass surface via electrostatic self assembly. A source electrode, a bottom CuPc layer, and a Schottky gate electrode were deposited succeedingly on the particle-adsorbed glass substrate. After the particles were removed, a large number of nano-holes were formed without destroying the films. A top CuPc layer and a top drain electrode were deposited on the nano-hole layers to complete the SIT, where the nano-holes work in parallel as active conducting channels. The obtained SIT characteristics showed that the source-drain current is modulated by a positive gate bias.
引用
收藏
页码:327 / 331
页数:5
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