ION-BEAM OXIDATION

被引：30
|
作者：
HARPER, JME
HEIBLUM, M
SPEIDELL, JL
CUOMO, JJ
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 06期
基金：
美国国家科学基金会;
关键词：
D O I：
10.1063/1.329220
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：4118 / 4121
页数：4
相关论文
共 50 条
  • [1] ION-BEAM OXIDATION
    HARPER, JME
    HEIBLUM, M
    SPEIDELL, JL
    CUOMO, JJ
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1981, 26 (03): : 446 - 446
  • [2] ION-BEAM INDUCED OXIDATION OF SILICON
    HOLMEN, G
    JACOBSSON, H
    APPLIED PHYSICS LETTERS, 1988, 53 (19) : 1838 - 1840
  • [3] ION-BEAM OXIDATION OF GAAS - THE ROLE OF ION ENERGY
    VANCAUWENBERGHE, O
    HERBOTS, N
    MANOHARAN, H
    AHRENS, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (03): : 1035 - 1039
  • [4] Ion-beam induced oxidation of GaAs and AlGaAs
    Alay, J.L.
    Vandervorst, W.
    Bender, H.
    Journal of Applied Physics, 1995, 77 (07):
  • [5] ION-BEAM MODIFICATION AND THERMAL-OXIDATION
    SRINIVASAN, V
    MCCORMICK, AW
    RAI, AK
    JOURNAL OF METALS, 1984, 36 (08): : 24 - 30
  • [6] ION-BEAM OXIDATION FOR JOSEPHSON CIRCUIT APPLICATIONS
    PEI, SS
    VANDOVER, RB
    APPLIED PHYSICS LETTERS, 1984, 44 (07) : 703 - 705
  • [7] ION-BEAM DEPOSITION AND INSITU ION-BEAM ANALYSIS
    ALBAYATI, AH
    ORRMANROSSITER, KG
    ARMOUR, DG
    VANDENBERG, JA
    DONNELLY, SE
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1992, 63 (1-2): : 109 - 119
  • [8] LOW-ENERGY ION-BEAM OXIDATION OF SILICON
    TODOROV, SS
    SHILLINGER, SL
    FOSSUM, ER
    IEEE ELECTRON DEVICE LETTERS, 1986, 7 (08) : 468 - 470
  • [9] OXIDATION OF METALS BY AN OXYGEN ION-BEAM IN THE MBE PROCESS
    SHIMIZU, T
    NONAKA, H
    ARAI, K
    SURFACE AND INTERFACE ANALYSIS, 1992, 19 (1-12) : 365 - 368
  • [10] NIOBIUM JOSEPHSON-JUNCTIONS WITH REACTIVE ION-BEAM OXIDATION
    KLEINSASSER, AW
    BUHRMAN, RA
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1980, 25 (03): : 197 - 198
12345