GLOW-DISCHARGE PREPARATION OF AMORPHOUS HYDROGENATED SILICON FROM HIGHER SILANES

被引：103

作者：

SCOTT, BA

BRODSKY, MH

GREEN, DC

KIRBY, PB

PLECENIK, RM

SIMONYI, EE

机构：

来源：

APPLIED PHYSICS LETTERS | 1980年 / 37卷 / 08期

关键词：

D O I：

10.1063/1.92059

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：725 / 727

页数：3

共 22 条

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