COMPUTER-SIMULATION AND EXPERIMENTAL PERFORMANCE DATA FOR AN ELECTRON SPECTROMETER FOR ELECTRON-BEAM TESTING OF INTEGRATED-CIRCUITS

被引：0
|
作者：
DEUTGES, D [1 ]
GORLICH, S [1 ]
KUBALEK, E [1 ]
机构：
[1] UNIV DUISBURG GESAMTHSCH, FACHGEBIET WERKSTOFFE ELEKTROTECH, KOMMANDANTENSTR 60, D-4100 DUISBURG 1, FED REP GER
来源：
SCANNING ELECTRON MICROSCOPY | 1986年 / 1986卷
关键词：
D O I：
暂无
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
引用
收藏
页码：45 / 56
页数：12
相关论文
共 50 条
  • [1] ELECTRON-BEAM TESTING OF INTEGRATED-CIRCUITS
    REHME, H
    PHYSICS IN TECHNOLOGY, 1979, 10 (03): : 97 - 103
  • [2] FUNDAMENTALS OF ELECTRON-BEAM TESTING OF INTEGRATED-CIRCUITS
    MENZEL, E
    KUBALEK, E
    SCANNING, 1983, 5 (03) : 103 - 122
  • [3] TECHNIQUES FOR ELECTRON-BEAM TESTING AND RESTRUCTURING INTEGRATED-CIRCUITS
    SHAVER, DC
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1010 - 1013
  • [4] ELECTRON-BEAM TESTING OF INTEGRATED-CIRCUITS WITH MULTILEVEL METAL
    RADZIMSKI, ZJ
    RICKS, DA
    WOLCOTT, JS
    RUSSELL, PE
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06): : 2037 - 2040
  • [5] IMPROVED SECONDARY-ELECTRON SPECTROMETER FOR ELECTRON-BEAM TESTING OF LARGE-SCALE INTEGRATED-CIRCUITS
    SUVORINOV, AV
    FILIPCHUK, TS
    SHAKHBAZOV, SY
    IZVESTIYA AKADEMII NAUK SSSR SERIYA FIZICHESKAYA, 1992, 56 (03): : 138 - 142
  • [6] ELECTRON-BEAM PROBING OF INTEGRATED-CIRCUITS
    MENZEL, E
    BUCHANAN, R
    SOLID STATE TECHNOLOGY, 1985, 28 (12) : 63 - 70
  • [7] ELECTRON-BEAM TEST TECHNIQUES FOR INTEGRATED-CIRCUITS
    MENZEL, E
    KUBALEK, E
    SCANNING ELECTRON MICROSCOPY, 1981, : 305 - 322
  • [8] ELECTRON-BEAM SYSTEM TO FABRICATE INTEGRATED-CIRCUITS
    ANGELLO, SJ
    JOURNAL OF THE FRANKLIN INSTITUTE-ENGINEERING AND APPLIED MATHEMATICS, 1973, 296 (06): : 403 - &
  • [9] ELECTRON-BEAM MICROFABRICATION OF GAAS INTEGRATED-CIRCUITS
    OZDEMIR, FS
    HACKETT, LH
    GREILING, PT
    KRUMM, CF
    OTTO, OW
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (03) : C158 - C158
  • [10] ELECTRON DETECTORS FOR ELECTRON-BEAM TESTING OF ULTRA LARGE-SCALE INTEGRATED-CIRCUITS
    GARTH, SCJ
    SPICER, DF
    SCANNING ELECTRON MICROSCOPY, 1986, 1986 : 465 - 472
12345