MECHANISMS OF REACTIVE SPUTTERING OF INDIUM .1. GROWTH OF INN IN MIXED AR-N2 DISCHARGES

被引：111
作者：
NATARAJAN, BR
ELTOUKHY, AH
GREENE, JE
BARR, TL
机构：
[1] UNIV ILLINOIS, DEPT MECH ENGN, URBANA, IL 61801 USA
[2] UNIV ILLINOIS, COORDINATED SCI LAB, URBANA, IL 61801 USA
[3] UNIVERSAL OIL PROD CO, CORP RES LABS, DES PLAINES, IL 60016 USA
来源：
THIN SOLID FILMS | 1980年 / 69卷 / 02期
关键词：
D O I：
10.1016/0040-6090(80)90037-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：201 / 216
页数：16
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