REGROWTH-FREE WAVE-GUIDE-INTEGRATED PHOTODETECTOR WITH EFFICIENT TOTAL-INTERNAL-REFLECTION COUPLING

被引：9

作者：

BOSSI, DE

ADE, RW

BASILICA, RP

BERAK, JM

机构：

[1] United Technologies Research Center, East Hartford

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1993年 / 5卷 / 02期

关键词：

D O I：

10.1109/68.195992

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel technique utilizing an etched total-internal-reflection mirror for vertical waveguide-to-photodetector coupling is described. 83% quantum efficiency and 5-GHz bandwidth are achieved at lambda = 0.84 mum in a GaAs MSM photodetector illuminated by a low-loss (0.5 dB/cm) AlGaAs double-heterostructure (DH) waveguide. A significant advantage of total-internal-reflection coupling is its compatibility with the integration of low-loss active DH waveguide components without requiring epitaxial regrowth. Furthermore, this coupling technique is independent of both optical wavelength and polarization, and permits efficient waveguide coupling to extremely small-area photodetectors.

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页码：166 / 169

页数：4

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