NITRIDATION-ENHANCED CONDUCTIVITY BEHAVIOR AND CURRENT TRANSPORT MECHANISM IN THIN THERMALLY NITRIDED SIO2

被引：80
|
作者：
CHENG, XR
CHENG, YC
LIU, BY
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 03期
关键词：
D O I：
10.1063/1.340072
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：797 / 802
页数：6
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